High Precision 50.8mm 2inch 0.1mm 0.43mm Thickness Quality Sapphire
Wafer Orientation A-Plane M-Plane
Product Description:
Sapphire Substrate is a high-precision product for different size
of sapphire substrate, including 2inch, 4inch and 6inch. It has
clear aperture of over 90%, surface roughness of Ra less than
0.5nm, TTV of less than 5μm, perpendicularity of 3 arc sec and
surface orientation of ±0.5°. It is available in both C-plane and
M-plane, and A-plane is optional. Sapphire Substrate is ideal for
industrial, medical and other applications.
Features:
- Product Name: Sapphire Substrate
- Flatness: λ/10@633nm
- Parallelism: 3 Arc Sec
- Material: Al2O3 99.999%
- Thickness: 0.5-2mm
- TTV: <5μm
- Features: C-plane and M-plane sapphire windows with excellent
optical quality and superior sapphire windows
Applications:
The ZMSH Sapphire Substrate is a perfect choice for those who need high quality 2inch, 4inch
and 6inch sapphire windows, sapphire wafers and sapphire
substrates. It is made of Al2O3 99.999%, with a surface orientation
of ±0.5°, a surface roughness of Ra<0.5nm, a TTV of <5μm and
a parallelism of 3 arc sec. It is available in two different types,
C-plane and M-plane, for various applications. It is widely used in
the fields of optoelectronics, photovoltaics, semiconductors,
displays, etc. With superior performance, it offers excellent
optical transmission, high thermal conductivity and superior
mechanical strength. The Sapphire Substrate from ZMSH is a
cost-effective solution for your projects.
Technical Parameters:
| Substrate Type | Single Crystal |
|---|
| Surface Roughness | Ra<0.5nm |
| Parallelism | 3 Arc Sec |
| TTV | <5μm |
| Perpendicularity | 3 Arc Sec |
| Warp | <20μm |
| Thickness | 0.5-2mm |
| Surface Orientation | ±0.5° |
| Clear Aperture | >90% |
| Bow | <20μm |
| No | (Properties) | (Target) | (Tolerance) |
|
| 1 | Diameter | 50.8mm | ± 0.1mm |
| 2 | Thickness | 430μm | ±15μm |
| 3 | Surface orientation of C-plane | off C-axis to M0.2° | ± 0.1° |
| 4 | Primary flat length | 16mm | ±11mm |
| 5 | Primary flat orientation | A-plane(11-20) | ±0.1° |
| 6 | Back side Roughness | 0.8~1.2um | |
| 7 | Front side Roughness | <0.3nm |
| 8 | Wafer edge | R-type |
| 9 | Total Thickness Variation, TTV | ≤ 10μm(LTV≤5μm,5*5) |
| 10 | SORI | ≤10μm |
| 11 | Bow | -10 μm ≤ BOW ≤ 0 |
| 12 | Laser Mark | N/A |
| 13 | | Package | 25 wafers in one cassette |
|
| Trace ability | Wafers shall be traceable with respect to cassette number |
|
Customization
ZMSH Sapphire Substrate is a high-quality single-crystal product
with superior surface quality. The product is made of C-plane or
M-plane sapphire windows and has a thickness of 0.5-2mm. The warp
of the sapphire wafer is less than 20μm and the parallelism is 3
arc seconds.
Sapphire substrate material is a kind of LED chip substrate
material, sapphire stability is very good, can be used in the high
temperature growth process; Finally, sapphire has high mechanical strength and is easy to
handle and clean. Therefore, most processes generally use sapphire as a substrate
Packing and Shipping:
Sapphire Substrate Packaging and Shipping:
Each sapphire substrate is packed in an individual box and shipped
in a bubble-wrap lined box.
The boxes are filled with foam to keep the sapphire substrates
secure during transportation.
The packages are then sealed with tape and labeled with the product
information.
The packages are then carefully loaded onto the shipping pallet and
shipped to the customer.
