High Temperature Resistant Alumina Ceramic Vertical Wafer Boat with 25 pcs Wafer Slot
Key words : Alumina Ceramic Vertical Wafer Boat
A wafer boat for supporting silicon wafers. The wafer boat includes
a ceramic body having at least one wafer support structure sized to
support a silicon wafer thereon. A ceramic coating is disposed on a
surface of the wafer slot. The ceramic coating has an impurity
migration preventing thickness and a wafer contact surface. The
wafer contact surface has a post coating surface finish, which
substantially prevents slip in the silicon wafers.
The present invention relates to semiconductor manufacturing. More
specifically, the present invention relates to wafer boats having
wafer support structures, such as slots, that are coated with a
protective ceramic coating and subjected to a post coating
finishing process to define a wafer contact surface having a post
coating surface finish for each slot.
Although other materials may be used, e.g., Silicon-Germanium
(SiGe) or Galium Arsenide (GaAs), Silicon (Si) is presently the
most important semiconductor for the electronics industry. Very
Large Scale Integrated (VLSI) circuit technology (i.e., up to about
100,000 devices per chip), and Ultra Large Scale Integrated (ULSI)
circuit technology (i.e., more than 100,000 and in some cases
exceeding one billion devices per chip) being based almost entirely
on silicon.
Alumina Ceramic Wafer Boat
The increasing size of silicon wafers is one of the most obvious
trends in silicon material technology. Presently, 300mm diameter
wafers are expected to ultimately replace most 150 mm and 200 mm
wafer applications. It is also predicted that 400 mm wafers will
probably be introduced in the not too distant future. The use of
larger diameter wafers for maintaining productivity presents
several major challenges to semiconductor manufactures. For
example, facilities with equipment capable of handling the larger
wafers, e.g., vertical furnaces, must be built. New patterning
techniques must be developed to print smaller feature sizes over
larger areas. The larger wafers must also be thicker to increase
their resistance to warping and other structural deformations.
Moreover, the larger wafers are also heavier, requiring the use of
automated wafer transport systems.
Ceramic Wafer Boat Features:
- High purity
- Excellent electrical & thermal insulator
- Exceptional temperature resistance up to 3000°F (1650°C)
- Outstanding corrosion resistance to acids, solvents, salts, and
organics
| Unit | 95% Al2O3 | 99% Al2O3 | ZrO2 | GP-Si3N4 |
| Color | - | white | ivory | white | gray |
| Density | g/cm³ | 3.70 | 3.90 | 6.04 | 3.31 |
| Water Absorption | % | 0 | 0 | 0 | 0 |
| Young's Modulus | Gpa | 280 | 350 | 205 | 295 |
| Vickers Hardness | Gpa | 14 | 20 | 12 | 18-20 |
| Flexural Strength ( at R.T. ) | Mpa | 280 | 300 | 900 | 650 |
| Compressive Strength ( at R.T. ) | Mpa | 2000 | 2500 | 2200 | 2200 |
| Thermal Conductivity ( at R.T. ) | W/(m.K) | 18-25 | 30 | 2.2 | 25 |
| Thermal Shock Resistance | ΔT(°C) | 220 | 180-200 | 280-350 | 450-650 |
| Max. Working Temperature ( at R.T. ) | °C | 1500 | 1700 | 800 | 1200 |
| Volume Resistivity ( at R.T. ) | Ω.cm | >10^15 | >10^14 | >10^12 | >10^14 |
| Dielectric Constant (1 MHz at R.T. ) | - | 9.50 | 9.80 | 26 | 8.20 |
| Dielectric Strength | kV/mm | 16 | 22 | - | 16 |
Typical Characteristics Rotor: Outside diameter: < 30,00 mm (
1.18") Thickness: < 7,00 mm ( . 28") Groove(s) dimensions: Width
> 0,051 mm ( .0002") Depth > 0,13 mm ( .0052") Length >
2,00 mm ( .0780") Stator: Outside diameter: < 30,00 mm ( 1.18")
Thickness: < 7,00 mm ( . 28") Hole diameter: > 0,22 mm x 0,25
mm (.008" x .010") Surface finish, Rotor or Stator Zirconia:
0,025 m (1 in) or N1 Alumina 99,9 %: 0,05 m (2 in) or N2
Alumina 96% or 99,7%: 0,1 to 0,2 m (4 to 8 in) or N3 to N4
Advantage of Ceramic Wafer Boat
1. Isostatic pressed.
2. Fire resistance.
3. Superior mechnical strength.
4. High corrosion and wear resistance.
5. High Temperature Resistance.
6. Good Insulation Performance Precision.
7. Zirconia and alumina ceramic material.
They are high corrosion and wear resistance and strong impact
resistance and delivers 10 times longer working life than metal
plunger. They give a longer life to the sealed packing material.
Product Photos Show
Packaging and Shipping
Packed in PP bag or sponge tray, then put in standard export carton
packing, or OEM packing.
Shipped by Air ( DHL, TNT, UPS, Fedex, EMS ), or Sea
transportation.
Company information
Who Are We?
Mingrui is a professional factory with years OEM experience in
manufacturing industrial ceramic parts.
What Do We Do?
We produce (OEM ) strengthened structure zirconia and alumina
ceramic rod,tube, shaft, plate, sleeve, valve, plunger, bearing,
nozzle and ceramic arm, they are applicable to instruments, medical
instruments, clocks and electronic products, mills, energy and
power, machine and metals, autocar and military, spaceflight and
some other high-end fields.
All of our products with certificates, such as , CE, TUV, and so
on.
Factory Show
Our Factory Welcomes Your Visiting!
