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KYKY Field Emission Scanning Electron Microscope / Scanning Electron Microscopy Instrumentation

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KYKY Field Emission Scanning Electron Microscope / Scanning Electron Microscopy Instrumentation


EM80 series field emission scanning electron microscope is positioned as an economical Schottky thermal field emission scanning electron microscope with rich extensibility and high cost performance, which is widely used in various fields such as materials science, biology, medicine, chemistry, and environmental science.

Advantages:

◆ Schottky field emission gun

◆ Multi-stage high performance lens system

◆ High beam stability

◆ Customizable extra-large sample chamber

◆ Simple operation

◆ Rich extensibility and high cost performance


Specifications:

ItemEM8010
Resolution
SE 1.5nm@15kV BSE 3nm@30kV
Magnification
1x-600000x
Electron GunSchottky Field Emission Gun
Accelerating Voltage
0.2kV-30kV
Vacuum System
2 Ion Pumps, 1 Magnetic Levitation Turbo Molecular Pump, 1 Dry Pump
Objective ApertureMolybdenum aperture adjustable outside vacuum system
Specimen StageFive axes stage
TravelX(Auto)0 ~ 80mm
RangeY(Auto)0 ~ 50mm
 Z(Manual)0 ~ 30mm
 R(Manual)360°
 T(Manual)-5° ~ 70°
Max Specimen Diameter175mm
Detector
  • High Vacuum Secondary Electron Detector
  • Infrared CCD detector
  • Four-quadrant Backscatter Detector ※
  • Optical navigation ※
ModificationStage Upgrade;EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator;SEM+Coating Machine;SEM+Laser
Accessories
EDS/EBSD/STEM/CL/Heating Stage/Cooling Stage / Tensile Stage, etc.
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