Ceramic robotic arm plays a role in handling in semiconductor
equipment. It is equivalent to the hand of the robot of the
semiconductor equipment and is responsible for carrying wafer
silicon chips to the specified location. Because the wafer silicon
chip is extremely vulnerable to other particles, it is generally
carried out in a vacuum environment.
In this environment, the robotic arm of most materials is generally
difficult to complete the work. Materials to make robotic arms
require high temperature resistance, wear resistance, and hardness.
At this time, some people found that fine ceramic materials can
meet these conditions. There are two types of general ceramic
robotic arms, one is alumina ceramic robotic arm, and the other is
silicon carbide ceramic robotic arm.
Alumina ceramics and silicon carbide ceramics have the physical
properties of dense quality, high hardness, and high abrasion
resistance, as well as good thermal resistance, excellent
mechanical strength, good insulation, good corrosion resistance,
etc. It is an excellent material for making semiconductor equipment
robotic arms.
But in terms of performance, the robotic arm made of silicon
ceramics is better than the robotic arm made of alumina ceramics.
Normally sintering silicon carbide ceramic products are made of
high-purity and ultra-fine silicon carbide microfillings. It is
made of 2450℃ high-temperature sintering. The silicon carbide
content is above 99.1%, and the density of the product is ≥3.10g/cm3.
