Ceramic Vacuum Chucks, Ceramic Filters, Ceramic Diffusers, Ceramic
Air Bearings, Ceramic Permeable Substrates
The range of Innovcera porous ceramic filters are made from
aluminum oxide and silicon carbide. The strong, uniform porous
ceramic has 40-50% open porosity with a tortuous pore structure and
is available in pore sizes ranging from 6 to 90 microns.
Maximum Temperature
Up to 1000C for porous ceramic, limited only by sealants, gaskets
and/or hardware materials.
Corrosion Resistance
Porous ceramics are resistant to most acids, except for
Hydrofluoric Acid and Phosphoric Acid. In alkaline solutions,
porous ceramics are resistant up to pH9. It is also resistant to
organic solvents. The sealants, gaskets and/or hardware materials
used, may be the limiting factor in certain fluids.
Characteristics Chart
| Product number | Density g/cm3 | Coefficient of elasticity GPa | Bending strength MPa | Coefficient of thermal expansion ×10-6/K | Coefficient of thermal conductivity W/m・K | Electrical resistance Ω・cm |
|---|
| Alumina | A995 | 3.9 | 380 | 450 | 7.3 | 30 | 30 |
| Alumina porous | - | 2.5 | 55 | 50 | 7.4 | - | 30 |
| Silicon carbide | Standard product | 3.1 | 410 | 500 | 4.6 | 170 | 170 |
| Silicon carbide porous | - | 2.1 | 55 | 50 | 4.7 | - | 26 |
Cleanability
Porous ceramic is cleanable by a variety of methods, depending on
type of contaminant to be removed. Methods include spraying,
brushing, backwashing, oven firing, dilute acid cleaning, solvent
cleaning, steam cleaning and ultrasonic cleaning.
Porous ceramics are used for:
Ceramic Vacuum Chucks
Ceramic Filters
Ceramic Diffusers
Ceramic Air Bearings
Ceramic Permeable Substrates
Ceramic Dispersion Media
Ceramic Ash Handling
Ceramic Wicking Media
Ceramic Fluidized Bed Plates
Ceramic Specialty Spargers
Ceramic Breathers – Vents
Porous ceramics are used where uniform controlled pore size is
required in chemical process, semiconductor, pharmaceutical and
manufacturing applications.
