high quality pure titanium Gr1 Gr2 titanium disc sputtering target
The target material is the target material bombarded by high-speed
charged particles. There are metals, alloys, oxides, etc. Replace
different target materials (such as aluminum, copper, stainless
steel, titanium, nickel targets, etc.), you can get different film
systems (such as super-hard, wear-resistant, anti-corrosion alloy
film, etc.).
(1) Metal targets: nickel target, Ni, titanium target, Ti, zinc
target, Zn, chromium target, Cr, magnesium target, Mg, niobium
target, Nb, tin target, Sn, aluminum target, Al, indium target, In,
iron target, Fe, zirconium aluminum target, ZrAl, titanium aluminum
target, TiAl, zirconium target, Zr, aluminum silicon target, AlSi,
silicon target, Si, copper target Cu, tantalum target T, a,
germanium target, Ge, Silver target, Ag, cobalt target, Co, gold
target, Au, gadolinium target, Gd, lanthanum target, La, yttrium
target, Y, cerium target, Ce, tungsten target, w, stainless steel
target, nickel-chromium target, NiCr, hafnium Target, Hf,
molybdenum target, Mo, iron-nickel target, FeNi, tungsten target,
W, etc.
(2) Ceramic targets: ITO target, magnesium oxide target, iron oxide
target, silicon nitride target, silicon carbide target, titanium
nitride target, chromium oxide target, zinc oxide target, zinc
sulfide target, silicon dioxide target, one Silicon oxide target,
cerium oxide target, zirconium dioxide target, niobium pentoxide
target, titanium dioxide target, zirconium dioxide target, hafnium
dioxide target, titanium diboride target, zirconium diboride
target, tungsten trioxide target, Aluminum oxide target, tantalum
oxide, niobium pentoxide target, magnesium fluoride target, yttrium
fluoride target, zinc selenide target, aluminum nitride target,
silicon nitride target, boron nitride target, titanium nitride
target , Silicon carbide target, lithium niobate target,
praseodymium titanate target, barium titanate target, lanthanum
titanate target, nickel oxide target, sputtering target, etc.
2. The main performance requirements of the target
(1) Purity
Purity is one of the main performance indicators of the target,
because the purity of the target has a great influence on the
performance of the film. However, in practical applications, the
purity requirements of the target materials are also different. For
example, with the rapid development of the microelectronics
industry, the size of silicon wafers has grown from 6 ", 8" to 12
", and the wiring width has been reduced from 0.5um to 0.25um,
0.18um or even 0.13um, the previous target purity of 99.995% Can
meet the technical requirements of 0.35umIC, and the preparation of
0.18um lines requires 99.999% or even 99.9999% for the purity of
the target.
(2) Impurity content
Impurities in the target solid and oxygen and water vapor in the
pores are the main sources of pollution for the deposited film.
Different targets have different requirements for different
impurity contents. For example, pure aluminum and aluminum alloy
targets used in the semiconductor industry have special
requirements for alkali metal content and radioactive element
content.
(3) Density
In order to reduce the pores in the solids of the target and
improve the performance of the sputtered film, the target is
usually required to have a higher density. The density of the
target not only affects the sputtering rate, but also affects the
electrical and optical properties of the film. The higher the
target density, the better the film performance. In addition,
increasing the density and strength of the target allows the target
to better withstand the thermal stress during sputtering. Density
is also one of the key performance indicators of the target.
(4) Grain size and grain size distribution
The target material is usually polycrystalline, and the grain size
can be on the order of microns to millimeters. For the same target
material, the sputtering rate of the target with fine grains is
faster than that of the target with coarse grains; the thickness of
the film deposited by sputtering the target with a small difference
in grain size (uniform distribution) is more uniform .
3. Material
TA0, TA1, TA2, TA9, TA10, ZR2, ZR0, GR5, GR2, GR1, TC11, TC6, TC4,
TC3, TC2, TC1
4. Purpose
It is widely used in decorative coatings, wear-resistant coatings,
CDs and VCDs in the electronics industry, as well as various
magnetic disk coatings.
Tungsten-titanium (W-Ti) films and tungsten-titanium (W-Ti) -based
alloy films are high-temperature alloy films with a series of
irreplaceable excellent properties. Tungsten has properties such as
high melting point, high strength and low coefficient of thermal
expansion. W / Ti alloy has low resistance coefficient, good
thermal stability and oxidation resistance. Such as various devices
require metal wiring that plays a conductive role, such as Al, Cu,
and Ag have been widely used and researched. However, the wiring
metal itself is easily oxidized, reacts with the surrounding
environment, and has poor adhesion to the dielectric layer. It is
easy to diffuse into the substrate materials of devices such as Si
and SiO2, and it will form metal and Si at a lower temperature.
Compounds, which act as impurities, greatly degrade the performance
of the device. The W-Ti alloy is easy to be used as a wiring
diffusion barrier due to stable thermomechanical properties, low
electron mobility, high corrosion resistance and chemical
stability, especially suitable for use in high current and high
temperature environments .
2.Image
3.Factory & Certificate
4.Package & Delivery
package:
Wrap the ti target material with pearl cotton and put it in a
wooden box. Our reasonable packaging method can avoid the target
materials from colliding with each other during transportation, and
can also prevent the impact of external goods on the product, and
ensure that the product is delivered after delivery Integrity.
---1. The sealed packaging,then put in the Carton cas or standard
standard plywood case.
---2.Using exclusive custom carton with customer logo, each individual
packaging, to help buyers direct sales.
---Accept customer requirment
Make sure that each package is tailor-made for you.ensure when you get the goods no damaged.
