WFS-100F Adsorption Tail Gas Treatment Equipment
The types of gases that can be treated by the scrubber tail gas
treatment device include electronic gases used in the etching
process and chemical vapor deposition process in semiconductor,
liquid crystal and solar industries, mainly including SiH4,
SiH2Cl2, PH3, B2H6, TEOS, H2, Co, NF3, SF6, C2F6, wf6, NH3, N2O,
etc
Product parameters
| 1 | Machine Model | WFS-100F |
| 2 | Scrubbing Type(Type of gas treatment principle) | Chemical adsorption |
| 3 | Capacity(Maximum gas processing flow) | 17CMM(1000CMH) |
| 4 | Dimension(mm)Machine size | 800(L)*800(W)*1200(H) |
| 5 | power | 1Ψ,220V 50/60HZ 20A |
| 6 | System inlet | ISO-100(4” tube) |
| 7 | System outlet | ISO-100(4” tube) |
| 8 | Vent(Dimension of exhaust port of machine cavity) | 4” tube,100CFM |
Type of gas to be treated
| product | Gas type |
| Acid gas | AC-series | BF3,HF,F2,WF+,SiF4.ect |
| Hydride or metal containing gas | HM-series | PH3,AsH3,GeF4,B2H6,ect |
| Halogenated gas | BA-series | NH3,Na(OH),ect |
| Nitride gas | NT-series | NH3,TDMAT,HCW,N2O,NO,NO2,Nox,ect |
| Organic gas | OC-series | SiH4,DCS,TCS,TEOS,DEZ,PGMEA,ect |
| Sulfide gas | SL-series | H2S,H2Se,SO2,ect |
Project Case
Advantages of laboratory air supply system
1. Maintain gas purity
2. Uninterrupted gas supply: the system can switch between gas
cylinders manually and automatically to ensure continuous gas
supply
3. Low pressure warning: when the air pressure is lower than the
alarm limit, the alarm device can automatically start the alarm
4. Stable gas pressure: the system uses two-stage decompression to
supply gas, which can obtain very stable pressure
5. High efficiency: through the gas supply control system, the gas
in the gas cylinder can be fully used to reduce the gas storage
margin and reduce the gas consumption cost
6. Easy operation: all gas cylinders are stored in the same
location, reducing the operation of handling and installation, and
saving time and cost
The following is the project diagram of the laboratory gas supply
installation
FAQ
1. who are we?
We are based in Guangdong, China, start from 2011,sell to Southeast
Asia(20.00%),Africa(20.00%),Eastern Asia(10.00%),Mid
East(10.00%),Domestic Market(5.00%),South Asia(5.00%),Northern
Europe(5.00%),Central America(5.00%),Western Europe(5.00%),South
America(5.00%),Eastern Europe(5.00%),North America(5.00%). There
are total about 51-100 people in our office.
2. how can we guarantee quality?
Always a pre-production sample before mass production;
Always final Inspection before shipment;
3.what can you buy from us?
pressure regulator,Tube fittings,solenoid valve,Needle valve,check
valve
4. why should you buy from us not from other suppliers?
We have a couple of years with professional engineers and dedicated
technicians.can provide security products for you
5. what services can we provide?
Accepted Delivery Terms: FOB,CIF,EXW；
Accepted Payment Currency:USD,CNY;
Accepted Payment Type: T/T,L/C,Western Union;
Language Spoken:English,Chinese
