Gold, silver and copper Ceramic PVD Sputtering Deposition Machine ,

Au Gold Sputtering Deposition Equipment, Silve/Gold PVD Deposition Machine, Conductive Film PVD Sputtering System

Summary: The DPC process- Direct Plating Copper is an advanced coating technology applied with LED / semiconductor / electronic industries. One typical application is Ceramic Radiating Substrate. Cooper conductive film deposition on Aluminum Oxide (Al2O3), AlN substrates by PVD vacuum sputtering technology, compared with traditional manufacturing

methods: DBC LTCC HTCC, much lower production cost is its high feature.

Royal technology team assisted our customer to developed the DPC process successfully with PVD sputtering technology.

Keywords: Ceramic sealing parts, DPC process, Copper PVD Sputtering system, LED Ceramic Chips With Cooper Plating, Al₂O₃, AlN Ceramic Circuit Boards, Al2O3 Plates On LED, Semiconductor

Applications of DPC:

· HBLED

· Substrates for solar concentrator cells

· Power semiconductor packaging including automotive motor control

· Hybrid and electric automobile power management electronics

· Packages for RF

· Microwave devices

DPC Technology Performance

Various substrate materials: Ceramic (Al3O2, AlN), Glass, and Si

• Much lower production cost.
• Outstanding thermal management and heat-transfer performance
• Accurate alignment and pattern design
• Robust metallization adhesion

Features:

• High throughput up to 2.2 ㎡ Ceramic substrate per cycle;
• Strong adhesion with powerful heating-up device and plasma source cleaning;
• Compact design and with easy access for upgrading and maintenance work.
• Fully Automation, PLC+Touch Screen, one-touch control system.
• High efficiency with less power consumption, max. 50% production cost saving.

Technical Specifications

• Performance

1. Ultimate Vacuum Pressure: better than 9.0*10^-5 Pa;

• Base Vacuum pressure: 3.0*10^-2 Pa

3. Pumping down Time: from atm to 1.0×10^-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)

4. Deposition source: Gencoa magnetron sputtering cathodes, steered arc cathodes, Ion source

5. Operating Model: Full Automatically /Semi-Auto/ Manually

6. Heating: from room temperature up to max. 500℃,

9. Ion source for PECVD and PA PVD process.

• Structure

The vacuum coating machine contains key completed system listed below:

1. Vacuum Chamber

1.1 Size: Inner Diameter: 1200mm

Inner Height: 1500mm

1.2 Material: Vacuum Chamber SUS304

Door and flanges SUS304

Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

Chamber chassis SS41 mild steel with painted finishing surface treatment.

1.3 Chamber Shield : SUS304

1.4 View Window: 2 on door

1.5 Vacuum Chamber Venting Valve (including silencer)

1.6 Door: SUS304 material

2. Roughing Vacuum Pumping System:

Oil rotary vane vacuum pump + Holding Pump

3. High Vacuum Pumping System: Magnetically Suspension Molecular Pump - 2 sets

4. Electrical Control and Operation System- PLC+ Touch Screen Operation System:

Suppliers:

PLC: Mitsubishi + Touch Screen (Made in China)

Electronic Components: SCHNEIDER,OMRON.

Safety Protecting System: Numerous safety interlocks to protect operators and equipment ( water, current gas, temperature etc.)

Coating Processes System: Process Automation & Control.

4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2 Power Supply: DC/MF sputtering power + DC Arc power + Bias Power Supply

4.3 Deposition control system

4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

4.5 Measuring System

Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge -- Europe brand

Temperature measuring device: Thermo-couple
MFC: Mass Flow Controller ( 4 ways ),

4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation

4.7 Power Load Indicator: Voltage indicator and load current indicator

5. Deposition System

5.1 Deposition source: Sputtering cathodes+ Arc sources + Ion Source

5.2 Deposition material: Copper, Aluminum, Chrome, Silver, Gold, SS, Titanium etc.

6. Sub-System

6.1 Air Compressed Valve Control System

6.2 Cooling Water System:Water flow pipe and switch valve system

7. Working Environment

Compressed Air: 5~8kg/cm2

Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
Water-In Pressure: 2~3 kg/cm2,

Power: 3 Phase 380V 50Hz(60Hz), 130kVA, average power consumption: 60KW

Installation Area: (L*W*H)4400*3200*2950mm

Exhaust: Vent for mechanical pumps

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are located in Shanghai and our global network of service centers ensure fast customer service response in key locations.

 Shanghai Royal Technology has a strong drive for innovative design and high quality components selection, combined with an extra careful assembly process and a topnotch team of talented technicians and inventors, which enable us to offer turn-key coating solutions with high standard vacuum equipment, meeting and often exceeding Western standard. We are determined to serve the market worldwide in various industries such as:

Consumer electronics, automotive, renewable energy, architecture, Nano and bio-medical materials.

RTAS model,the arc and sputtering integrated series equipment can produce highly reflective black and bronze films specifically for high quality decorative coatings.

RTSP1200-FCEV, It is a sputtering system with PECVD process to deposit thin film on hydrogen fuel cell power modules. Fuel Cell Vehicles is the newest technology for the next generation of environmentally friendly cars. The main advantage and technological progress compared to commonly used batteries like dry cell need to undergo a recurring recharging process, but hydrogen fuel cell power modules only require Hydrogen and Oxygen reaction to generate power for driving.

RTSP1200-DPC,This coating system is exclusively used for the DPC (Direct Plating Copper) ceramic substrates process. The DPC ceramic substrates are widely used in various applications: for instance in high brightness LED to increase the longevity because of its high heat radiation performance, Semiconductor equipment, in microwave wireless communication, military electronics, various sensor substrates, aerospace, railway transportation, electricity power and much more.

RT-CsI950, Evaporation coating plant is applied to CsI film deposition for X-Ray Imaging devices. It is an advanced technique to evaporate CsI on the screen to create high quality images. The high-resolution performance allows this application to be extremely efficient and disruptive in the medical instrument, nuclear energy industry, security checking and inspection, high energy physics subjects and more.

Shanghai Royal Technology also successfully designed and developed Cube and Cylinder model large size Aluminum Vacuum Metalizing System which is used for Automotive Logo Board Coating.

     Live Locally, Think Globally is our Vision. We live our day to day business by the concept of “Integrity and Solidarity”, always striving for innovation to achieve win-win situations in our ecosystem of worldwide partners. As pioneers in the Vacuum Coating Equipment Industry, we never relied on previous accomplishments, but we continuously tried to explore the ever changing world of the Vacuum Coating Industry to always create optimal economic, social and environmental benefits for our customers.

ROYAL TECHNOLOGY'S CULTURE

ROYAL's Vision:  to be the worldwide famous brand supplier of providing total solutions to customers requirement.

ROYAL' Mission: protects the environment, saves our blue planet ; to improve labors tough working environment, enhance work efficiency, completely help owners to reduce production cost.

ROYAL's Philosophy: human-oriented, honest, innovative and make the greatest contribution to society.

ROYAL's Value: innovation, advanced technology’s R&D, serving China and worldwide's manufacturing industries.

ROYAL's Service: ONE-STOP service, with excellent technology and products, professional dedication to serve our customers.