High Purity Silicon Target Material: Core Material for Thin Film
Deposition
Silicon target material is used in physical vapor deposition (PVD)
processes, primarily for depositing medium layers such as silicon
oxide, silicon nitride, and silicon hydride. It can be divided into
crystalline silicon and HSi types. Silicon targets are typically
dark gray with a semi-metallic appearance and a density of about
2.33 g/cm³. The melting point of silicon is 1414°C, and its boiling
point is 3265°C. Silicon has a high thermal conductivity
coefficient (149 W·m⁻¹·K⁻¹) and excellent thermal conductivity.
Additionally, silicon target material has good hardness, optical
properties, wear resistance, and excellent corrosion resistance.
Excellent Properties of Silicon Target Material:
l High Purity Ensures Stable Thin Film Performance
Crystalline silicon has a purity of 99.999%, while HSi purity is
99.99%
l Excellent Thin Film Uniformity and Density
Silicon targets have a high sputtering efficiency and are
compatible with various vacuum coating equipment in the PVD
process. At the same time, silicon atoms have good adhesion to
common substrates (such as glass, metal, silicon wafers), forming
stable, non-peeling films that meet high reliability requirements.
l Good Sputtering Rate and Adhesion
The good thermal conductivity of silicon helps dissipate heat from
the target surface quickly, preventing local overheating. Also, its
conductivity is essential for magnetron sputtering, aiding in
efficient film deposition.
Wide Applications of Silicon Target Material
l Optical Device Manufacturing
High Purity: Silicon targets ensure the clarity, stability, and
accuracy of optical devices, enhancing their performance and
reliability. Anti-reflection and protective layers: In fiber optic
communications and integrated optical circuits, silicon dioxide films are used as
waveguide materials to transmit and process optical signals.
l Semiconductor Manufacturing
Used to prepare substrates and packaging materials for LEDs,
providng improvement in the luminous efficiency and stability of
LEDs.
l Sensor Manufacturing
Used in the production of sensor elements and signal processing
circuits, enhancing the sensitivity and accuracy of sensors
