Titanium diboride targets are ceramic targets manufactured from
high-purity TiB₂ powders through hot pressing or sintering
processes. They are functional materials with high melting points
and high hardness. By combining the excellent chemical stability of
metallic titanium with the high hardness, wear resistance, and
corrosion resistance of borides,TiB₂ targets offer exceptional
performance. These targets are widely used in various coating
processes, including physical vapor deposition (PVD), magnetron
sputtering, and chemical vapor deposition (CVD), enabling the
deposition of high-performance ceramic thin films on diverse
substrates.
Outstanding Properties of Titanium Diboride Targets
l Ultra-high Hardness and Wear Resistance
The deposited films can achieve a Vickers hardness exceeding 3000
HV, significantly enhancing surface scratch resistance and wear
resistance.
l Excellent Corrosion and Oxidation Resistance
The films remain stable in acidic, alkaline, and high-temperature
oxidative environments, resisting reaction and degradation, making
them suitable for protective coatings under harsh operating
conditions.
l Good Electrical and Thermal Conductivity
Unlike conventional ceramics, titanium diboride exhibits a notable
level of electrical and thermal conductivity. This unique property
makes it suitable for advanced functional coatings that require
both exceptional hardness and conductive capabilities.
l Good adhesion and film density
Using high-purity TiB₂ targets enables the formation of dense,
uniform films with strong adhesion, improving product consistency
and reliability.
Wide Applications of Titanium Diboride Targets
l Display Panel
In the manufacturing of high-end displays such as LCDs, OLEDs, and
Mini/Micro-LEDs, indium cerium oxide targets can be sputtered to
form transparent conductive films with high transmittance and low
resistivity for display panel electrodes and interconnections,
significantly improving brightness uniformity, contrast, and
service life.
l Touchscreen technology
In touch products such as smartphones, tablets, automotive
displays, and industrial control panels, titanium diboride films
can replace traditional ITO films as touch electrodes, delivering
faster response, better transmittance, and improved flexibility
compatibility, supporting narrow bezels and large-size touchscreen
designs.
l Photovoltaic industry
In high-efficiency solar cells such as HJT and perovskite tandem
cells, they are used as transparent conductive electrode materials
to reduce series resistance, improve photoelectric conversion
efficiency, and enhance stability, providing higher-performance
conductive solutions for next-generation photovoltaic modules.
l Flexible electronics
They can be sputtered onto flexible substrates such as polyimide
(PI) and PET to form flexible transparent electrodes, applied in
emerging products such as foldable displays, wearable devices, and
flexible sensors.
l Optical device manufacturing
They are used for coating optical glass, optical film stacks,
filters, and anti-reflection coatings, maintaining high
transmittance while providing conductive or antistatic properties,
suitable for precision optical fields such as optical
communications and optical sensing.
