Custom Design Quartz Boats for Semiconductor Processing
Product Overview:
Our Custom Design Quartz Boats are precision-engineered to meet the
strict demands of semiconductor and chemical processing industries.
These high-purity containers, made from fused quartz (SiO₂), are
designed to securely hold and transport silicon wafers, substrates,
or other materials through high-temperature processes such as
diffusion, oxidation, and chemical vapor deposition (CVD). Quartz's
exceptional thermal stability, chemical resistance, and low thermal
expansion make it the ideal material for high-performance
applications in cleanroom environments.
We offer over 50 types and variations of quartz boats, including
customized designs to suit specific process requirements. Whether
you require a standard or non-standard design, our quartz boats are
crafted for durability and performance. Additionally, we provide
repair services, including fire repair, to extend the lifespan of
your quartz components.
Quartz Material Specifications:
| Parameter | Value |
|---|
| Material | Fused quartz (SiO₂) |
| Purity | 99.99% |
| Working Temperature | Up to 1200°C |
| Melting Point | 1660 - 1710°C |
| Boiling Point | 4046°C |
| Density | 2.2 g/cm³ |
| Thermal Expansion | 0.55 × 10⁻⁶ /°C (low thermal expansion) |
| Refractive Index | 1.46 |
| Thermal Conductivity | 1.3 W/m·K |
| Mechanical Strength | High strength, suitable for high-pressure environments |
| Chemical Resistance | Resistant to most chemicals, especially at high temperatures |
| Transparency | High transparency for process monitoring and wafer alignment |
| Thermal Shock Resistance | Excellent, resistant to rapid temperature changes without cracking |
Key Features:
Material: High-purity fused quartz (SiO₂)
Purity: 99.99% for minimal contamination
Thermal Resistance: Withstands extreme temperatures up to 1200°C without deformation
or degradation
Chemical Resistance: Inert to most chemicals, ensuring no contamination during
high-temperature processes
Low Thermal Expansion: Ensures dimensional stability during rapid temperature
fluctuations
Customization: Available in standard or customized sizes (e.g., 4" wafers, or
customized dimensions)
Hook Feature: Available with hooks at one end for easy wafer insertion and
removal from furnaces
Applications:
Semiconductor Manufacturing: Holds and transports silicon wafers during critical processes
such as diffusion, oxidation, and chemical vapor deposition (CVD).
Solar Cell Production: Essential in photovoltaic cell manufacturing for processing
silicon wafers, including doping and oxidation.
Research and Development: Ideal for academic and industrial labs where high-purity,
high-temperature applications are required.
Chemical Processing: Suitable for use in chemical processing industries where high
thermal and chemical stability is necessary.
Design Variations:
Grooved Slots: Different slot sizes to accommodate wafers of varying thickness,
with custom slot configurations available.
Geometries: U-type, V-type, or other custom shapes tailored to your process
needs.
Hook Design: Equipped with hooks for easy insertion and removal of wafers in
furnaces.
Sizes: Standard sizes for 100mm, 150mm, 200mm, and 300mm wafers. Custom
sizes available for specialized needs.
Benefits of Quartz Boats:
Exceptional Thermal Stability: Can endure temperatures exceeding 1000°C, ideal for
high-temperature processes like diffusion and annealing.
Ultra-High Purity: Quartz’s low impurity levels ensure minimal contamination,
particularly critical for advanced semiconductor production.
Dimensional Precision: The low thermal expansion of quartz ensures that the boat
maintains its shape and alignment during temperature fluctuations.
Versatility: Compatible with various semiconductor processes, including LPCVD,
oxidation, and annealing.
Automation-Ready: Designed with precision to integrate seamlessly with robotic
wafer handling systems, minimizing manual handling risks.
Quartz Boat FAQ:
Q1: Can quartz boats be reused?
Yes, with proper cleaning and maintenance, quartz boats can be
reused multiple times without compromising performance.
Q2: How should quartz boats be cleaned?
Quartz boats should be cleaned using acid baths or ultrasonic
cleaning methods in compliance with cleanroom standards. Avoid
sudden temperature changes during cleaning.
Q3: Are quartz boats compatible with all furnace types?
Yes, quartz boats are compatible with most horizontal and vertical
furnace systems used in semiconductor and photovoltaic processing.
Q4: What sizes are available for custom orders?
Quartz boats are available in standard sizes for 100mm, 150mm,
200mm, and 300mm wafers, with additional customization available
for specialized applications.
Related Products:
Request a Quote:
For more information or to request a quote, please contact us. We
will collaborate with you to design the perfect quartz boat
solution for your specific requirements.
