Product Description
MBF100-10 Type Chemical Vapor Deposition CVD Furnace 1000°C Melting
Furnace Heating Furnace ISO Certified Electric Fuel
1. Equipment Name and Model
MBF100-10 Type Chemical Vapor Deposition Furnace
The MBF100-10 Type Chemical Vapor Deposition (CVD) Furnace is
suitable for medium-temperature heat treatment of electronic
products. It is primarily used for gas-phase reaction processes of
related materials in atmospheres of nitrogen, helium, acetylene,
and hydrogen. It can also be utilized for sintering processes of
related materials under protective atmospheres.
2. Technical Specifications and Basic Configuration
- Rated Temperature: 750°C
- Maximum Temperature: 1000°C
- Heating Zone Dimensions: 770 × 770 × 300 mm (W × D × H)
- Effective Dimensions: 640 × 640 × 250 mm (W × D × H)
- Outer Chamber Material: SUS310S
- Inner Liner Material: Fused Quartz
- Product Size: Φ120
- Equipment Capacity: 16 substrates per batch
- Maximum Heating Power: 16 kW
- Heating Method: Bottom + Four Sides
- Temperature Control Points: Bottom + Side
- Thermocouple Type: K-Type
- Heating Rate: ≤8°C/min
- Heating Elements: FEC Ceramic Fiber Heaters
- Furnace Door Opening Method: Top-Opening Design
- Temperature Control Stability: ±1°C
- Temperature Control Instrument: Imported PID Controller with Auto-Tuning Function
- Program Steps: 20 steps
- Alarm and Protection: Over-temperature, thermocouple breakage, and other audible/visual
alarms, with over-temperature power-off protection
- Surface Temperature Rise: <35°C
- Weight: about 500kg
- Furnace Dimensions: about 1200×1200×1500mm (W×H×D)
3. Delivery List
| Item | Note | QTY |
|---|
| Basic Compositions |
| Furnace | | 1 unit |
| Certificates of Inspection | Furnace and major purchased components | 1 Set |
| Technical Documents | Furnace specifications, technical documents of major purchased
components, etc | 1 Set |
| Key Parts |
| Mass Flow Controller (MFC) | Yamatake or HORIBA | 4 Set |
| Touch screen | | 1 PC |
| Temperature Controller | | 1 Set |
| FEC Heater | | 1 Set |
| Quartz Liner | | 1 Set |
| Spares |
| SSR | | 1 PC |
4. Facility Requirements
4.1 Environmental conditions: Temperature 0 - 40°C, humidity ≤ 80% RH, no corrosive gas, no
strong airflow disturbance.
4.2 Ground requirements: level, no obvious vibration, bearing capacity > 500Kg/m².
4.3 Power conditions: capacity greater than 22kVA, 3 phases 5 lines, voltage 220/380V,
frequency 50Hz(according to local situation). Live wire: yellow,
green, red, neutral wire: blue, ground wire: yellow-green.
4.4 Installation site: 1500mm×1500mm×3000mm (W×H×D), installation area greater than
2.5m².
