Alumina Ceramic Custom Components High Hardness for Semiconductor
Manufacturing Equipment
Alumina ceramic custom components are advanced ceramic parts
manufactured through a series of processes including powder
preparation, forming, high-temperature sintering, and precision
machining, using high-purity aluminum oxide (Al₂O₃) as the primary
raw material. The alumina content typically ranges from 75% to
99.9%, with higher content yielding superior performance. These
products are not standard off-the-shelf items but rather
functional, engineered core components designed and produced
according to customers' specific application scenarios and
technical requirements.
ZMSH Services:
We are a supplier focused on high-performance ceramic and
semiconductor material solutions. We not only provide the design
and manufacturing of high-purity, high-density alumina ceramic
custom components but also possess a robust multi-material
technology platform. In addition to alumina products, we specialize
in producing sapphire wafers and optical windows, silicon carbide
(SiC) wafers, SiC ceramic trays and fixtures, as well as silicon
wafers, SOI (Silicon on Insulator), and other semiconductor
material products. We are committed to offering customers one-stop
custom services from material selection and structural design to
precision machining, meeting diverse needs in optoelectronics,
semiconductors, vacuum, high-temperature, and other extreme
environments.
Alumina ceramic custom components Key Parameter
| Alumina (Al₂O₃) Purity | Usually ≥ 99.6% |
| Bulk Density | ≥ 3.90 g/cm³ |
| Water Absorption | 0% |
| Flexural Strength | ≥ 350 MPa |
| Compressive Strength | ≥ 2500 MPa |
| Vickers Hardness (Hv50) | ≥ 1600 kgf/mm² |
| Maximum Use Temperature | ≥ 1600 °C |
| Thermal Conductivity | ~25-30 W/(m·K) |
| Coefficient of Thermal Expansion (CTE) | ~7-8 x 10⁻⁶ /K |
| Volume Resistivity | > 10¹⁴ Ω·cm @ 25°C |
| Dielectric Strength | ≥ 15 kV/mm |
| Surface Roughness (Ra) | Customizable, typically < 0.2 μm (even < 0.05 μm) |
| Flatness / Parallelism | According to the requirements of the drawing, it is usually at the
micrometer (μm) level. |
Alumina ceramic custom components Key Characteristics
The exceptional properties of alumina ceramic make it stand out
among numerous engineering materials:
① Extreme Hardness and Wear Resistance:
- With a Mohs hardness of up to 9, second only to diamond and silicon
carbide, it is highly resistant to scratching and wear. Even under
harsh conditions with particulates or frequent friction, it
maintains dimensional stability and surface smoothness over long
periods, significantly extending equipment service life.
② Excellent Electrical Insulation:
- It maintains high resistivity even in high-temperature and
high-humidity environments, making it an ideal high-temperature
insulating material. Widely used in circuit substrates, insulating
rings, coil bobbins, etc., it ensures the safe and stable operation
of electronic equipment under high voltage.
③ Good Chemical Stability:
- It exhibits strong resistance to most acids, alkalis, and solvents,
is insoluble in water, oxidation-resistant, and不易腐蚀 (not easily
corroded). This makes it highly suitable for chemical, biomedical,
and semiconductor equipment, serving as chambers, pipes, or
components that come into contact with corrosive media.
④ High Heat Resistance and Low Thermal Expansion Coefficient:
- With a melting point as high as 2050°C, it can operate long-term in
high-temperature environments up to 1600°C. Its low thermal
expansion coefficient means minimal deformation under rapid
temperature changes, good thermal shock resistance, and no cracking
due to thermal cycling.
⑤ High Mechanical Strength:
- Although less tough than metals, it has very high compressive
strength and can withstand significant loads.
Alumina ceramic custom components Application Fields
Leveraging these comprehensive properties, alumina ceramic custom
components are widely used in various critical aspects of high-tech
industries:
1. Semiconductor Manufacturing Equipment:
- Wafer Processing: Used as insulating parts in etching machines,
diffusion furnaces, and CVD equipment; wafer polishing pads;
chamber liners; gas distribution plates, etc. Its high purity,
plasma erosion resistance, and high-temperature resistance are
crucial.
- Packaging and Testing: Serves as probe card substrates, insulating
parts of test fixtures, etc.
2. Electronics and Power Industry:
- Circuit Substrates and Packaging: Used in thick/thin film circuit
substrates, electronic packaging housings (e.g., laser diode
packages), insulating shells for high-voltage switches, providing
mechanical support and electrical isolation.
- Energy-Saving Lamps and Vacuum Devices: Used as sodium lamp tubes,
arc tubes, insulating rings for vacuum connectors, etc.
3. Industrial Automation and Wear-Resistant Components:
- Used as thread guides and nozzles in textile machinery; focusing
lens mounts in laser welding equipment; guides and bearings in
precision instruments, leveraging its high wear resistance to
ensure long-term accuracy.
4. Medical and Biotechnology:
- Used in insulating components of medical devices, artificial
joints, dental materials, etc., utilizing its biocompatibility,
resistance to sterilization corrosion, and high hardness.
5. Energy and Chemical Industry:
- Used as separator plates in fuel cells, mechanical seal rings in
chemical pumps, valve components, etc., to handle corrosive and
high-temperature environments.
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1. Q: What are alumina ceramic components used for in semiconductor
manufacturing?
A: They are used for critical parts like wafer polishing pads,
plasma-resistant chambers, and insulating components due to their
high purity, wear resistance, and ability to withstand harsh
processing environments.
2. Q: Why is alumina preferred for high-temperature and corrosive
applications?
A: Alumina ceramic offers exceptional thermal stability, high
hardness, and excellent chemical inertness, making it ideal for use
in extreme conditions where metals and polymers would fail.
Tags: #Alumina Ceramic Custom Components, #Custom, #High Hardness, #Semiconductor Manufacturing Equipment
