Description
Titanium Sputtering Target — Titanium is a material that is widely
used in watches, biomedical implants, drill bits, laptops, etc. In
its pure metal form, titanium is lustrous and silvery-white in
appearance. It has a melting point of 1660°C, a density of 4.5 g/cc, and a vapor pressure of 10⁻⁴ Torr at 1,453°C. It is a sturdy material that can be easily fabricated when
heated.
With strong, lightweight characteristics and excellent corrosion
resistance, titanium is ideal for ocean liner hulls, aircraft
engines, and designer jewelry. As a biocompatible material, it is widely used in surgical tools and medical implants.
Titanium Sputtering Targets are generally evaporated in a vacuum
and deposited as coatings for wear resistance, decorative, semiconductor, and optical
applications.
Titanium Sputtering Targets (Ti Target)
Material: High purity (99.5%, 99.995%) Titanium Sputtering Target
Grade: Gr1, Gr2, Gr5/Ti6Al4V, Gr7 Titanium Sputtering Target
Standard: ASTM B381, ASTM B265, ASTM F67, ASTM F136
Shape: Discs, Rectangles, Custom Shapes Available
Application: Deposited film nitride as decorative thin film; deposited film
oxidized to TiO₂ as beam splitter or insulator
Physical Properties
| Grade | Tensile Strength (MPa-Min) | Yield Strength (MPa-Min) | Elongation (%) |
|---|
| Gr1 | 240 | 170 | 24 |
| Gr2 | 345 | 275 | 20 |
| Gr3 | 450 | 380 | 18 |
| Gr4 | 550 | 483 | 15 |
| Gr5 | 895 | 828 | 10 |
| Gr7 | 400 | 275 | 18 |
| Gr9 | 620 | 483 | 15 |
| Gr12 | 483 | 348 | 18 |
| Gr23/Gr5-Eli | 793 | 759 | 10 |
Chemical Composition
| Grade | Fe Max | O Max | N Max | C Max | H Max | Pd Max | Al Max | Va Max | Ni Max | Mo Max |
|---|
| Gr1 | 0.2 | 0.18 | 0.03 | 0.08 | 0.015 | - | - | - | - | - |
| Gr2 | 0.3 | 0.25 | 0.03 | 0.08 | 0.015 | - | - | - | - | - |
| Gr3 | 0.3 | 0.35 | 0.05 | 0.08 | 0.015 | - | - | - | - | - |
| Gr4 | 0.5 | 0.4 | 0.05 | 0.08 | 0.015 | - | - | - | - | - |
| Gr5 | 0.4 | 0.2 | 0.05 | 0.08 | 0.015 | - | 5.5–6.7 | 3.5–4.5 | - | - |
| Gr7 | 0.3 | 0.25 | 0.03 | 0.08 | 0.015 | 0.12–0.25 | - | - | - | - |
| Gr9 | 0.25 | 0.15 | 0.03 | 0.08 | 0.015 | - | 2.5–3.5 | 2.0–3.0 | - | - |
| Gr12 | 0.3 | 0.25 | 0.03 | 0.08 | 0.015 | - | 0.6–0.9 | 0.2–0.4 | - | - |
| Gr5Eli/Gr23 | 0.25 | 0.03 | 0.03 | 0.08 | 0.0125 | - | 5.5–6.5 | 3.5–4.5 | - | - |
Ti: Balance
Application
Titanium Targets
Used in hardware tool coating, decorative coating, semiconductor
components, and flat display coating. It is a core material in
integrated circuit production and usually requires >99.99%
purity.
Aluminum Targets
Common in semiconductor and heat-resistant coating applications,
also used in vehicles and electronics.
Copper Targets
Ideal for electrical conductivity applications such as electrodes,
wiring, and films.
Tin Targets
Applied to enhance corrosion resistance of coated materials.
Zinc Targets
Used as corrosion barriers and in the production of cathodes,
batteries, and paints.
Platinum, Silver, and Gold Targets
Precious metal sputtering targets offer chemical inertness and high
conductivity for instrument and electrode applications.
