RDE 530L CVD Coating Machine With Two Reaction Chambers And Heating
Elements
1. Equipment Strengths
1.1 Automatic Mode. According to the process settings, the
individual components and processes are automatically controlled.
Automatic control includes valve switch, process gas flow control,
process liquid flow control, reactor pressure control, heating
furnace and electric heating belt temperature control, etc.,
without human intervention in the whole process. The automatic
operation process realizes automatic alarm processing. According to
different alarm types, it will automatically enter the alarm mode
to protect the products in the furnace. After the alarm is
released, it can be manually restored to the state before the
alarm.
1.2. The process is monitored throughout the process, all sensor
data and valve status are saved to historical data, which can be
viewed at any time.
1.3. Manual mode. There is a safety interlock, which automatically
realizes the lock according to the gas type and temperature inside
the reactor, and the reactor cannot be opened at will. The manual
mode is set with one-button operation, such as vacuuming, H2 purge, N2 purge, etc., no need to manually move individual valves and vacuum
pumps.
1.4. The alarm data is automatically saved, and the historical data
can be retrieved at any time.
2 Main technical parameters
1. Power supply voltage: 380V 50HZ;
2. Maximum temperature: 1100°C;
3. Working temperature: 900-1050°C;
4. Total power: about 75KW;
5. Heating power: about 55KW;
6. Number of reaction chambers: 2
7. Effective size of reaction chamber: φ500 (inner diameter)
mm×1500 (effective
height) mm;
8. Occupation size (l×w×h) : 8100×7000×5100mm;
9. Equipment weight: about 10T
For more details, please email us or call us at +86-16673365810.
