Dry Pump Helium Leak Detector for Wafer Leak Detection SFJ-231D

Dry Pump Helium Leak Detector for Wafer Leak Detection SFJ-231D

Technical Parameters of Helium Leak Detector SFJ-231D

Application of SFJ-231D Helium Leak Detector for the Wafer

In helium mass spectrometry leak detection technology, the application of dry pumps (oil-free dry vacuum pumps) mainly depends on the working conditions of the equipment to be inspected, the cleanliness requirements and the technical requirements of helium mass spectrometry leak detectors (e.g. Wayeal SFJ-231D).

Detection Method: Vacuum Spray Helium Method (High-Sensitivity Mode)

1: System Evacuation and Baseline Calibration

Evacuate to base pressure: Etching chamber: ≤0.1Pa (dry pump + molecular pump combination); CVD/PVD chamber: ≤10⁻³ Pa (higher requirements for coating equipment).

Leak detector calibration: Use a standard leak reference (e.g., 1×10⁻⁷ Pa·m³/s) to calibrate the SFJ-231D and verify instrument response linearity.

Step 2: Helium Spray Detection

Detection area: O-ring grooves, bolt holes, VCR/VCO metal seals, weld joints, Ceramic insulators, copper gaskets, Bellows connections.

Helium spray operation:

Use a handheld helium spray gun (with 0.1 mm fine-tuning nozzle) at 3-5mm distance from the detection point. Move at 5cm/s speed, dwelling 2-3 seconds per point (SFJ-231D response time <1 sec). Adjust helium pressure to 0.2-0.3MPa to avoid airflow disturbance.

Step 3: Leak Point Determination and Recording

Leak rate: Semiconductor equipment allowable leak rate: Typically ≤1×10⁻⁹ Pa·m³/s (per SEMI standards).

Data recording: When the SFJ-231D displays a leak rate peak, mark the leak point with a highlighter pen.

Save leak rate curves and location data (export via USB).

Step 4: Re-inspection and Verification

Perform a second helium spray on identified leaks to confirm repeatability.

After repairing major leaks, re-evacuate to base pressure and conduct a full re-inspection.

Anhui Wanyi Science and Technology Cooperated Limited Company founded in 2003, is a professional manufacturer and supplier of analytical instruments with an international vision and operational standards, whose leading products cover chromatography, spectroscopy, mass spectrometry and varieties of industrial applications such as environment monitoring, leak detection, industrial intelligence, industrial process, medical devices. The total number of employees is more than 1400, including 500 research and development engineers with 20 post doctors and 200 masters.

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Under the spirit of "Quality Wayeal, Service Wayeal", Wayeal is committed to building an enterprise with strong international competitiveness in the field of analytical instruments, industrial applications, and life health, and becoming a model of a responsible and respectable Chinese enterprise.