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High-Precision Silicon Carbide Ceramic Circular Carrier Plate (Rotary Table / Seal Ring)

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High-Precision Silicon Carbide Ceramic Circular Carrier Plate (Rotary Table / Seal Ring)

High-Precision Silicon Carbide Ceramic Circular Carrier Plate (Rotary Table / Seal Ring)

Product Introduction

This product is a high-performance silicon carbide structural ceramic circular plate manufactured through advanced reaction-bonded or pressureless sintering processes. It features a distinctive silver-gray metallic luster and an extremely hard, wear-resistant surface. The design is precision-engineered with concentric rings and cross-hatched lines on the face for positioning or media distribution, along with standard mounting holes around the periphery for easy and secure installation. Combining superior mechanical, thermal, and chemical properties, this component is an ideal solution for critical applications in extreme operating conditions.

Key Advantages

  • Exceptional Hardness & Wear Resistance: Mohs hardness of 9.5, second only to diamond, significantly extends service life in high-friction environments.

  • Outstanding High-Temperature Resistance: Capable of long-term stable operation in temperatures up to 1650°C without softening or deforming.

  • Excellent Corrosion Resistance: Highly resistant to a wide range of acids, alkalis, salts, and other corrosive media.

  • High Thermal Conductivity & Low Thermal Expansion: High thermal conductivity and a low coefficient of thermal expansion result in superior thermal shock resistance, allowing it to withstand rapid temperature changes.

  • Structural Stability & Lightweight: High stiffness and strength, combined with a density lower than traditional metals, contributes to equipment lightweighting.

Specifications Table

ParameterSpecification / Value
Primary MaterialReaction-Bonded / Pressureless Sintered Silicon Carbide (SiC)
Product ShapeCircular Plate with Concentric Rings & Cross-Hatch
ColorSilver-Gray
Density≥3.10 g/cm³
Hardness≥ HRA 90 (Mohs 9.5)
Flexural Strength≥400 MPa
Thermal Conductivity80-120 W/(m·K)
Max. Operating Temperature1650°C (in air)
Surface FinishRa ≤ 0.4μm (Customizable upon request)

Primary Applications

Leveraging its comprehensive properties, this product is widely used in:

  • Precision Machinery: As high-accuracy rotary tables, bearing seats, linear guideway sliders.

  • Semiconductor Industry: Wafer carriers, etch chamber components, rapid thermal processing paddles.

  • Chemical & Pump/Valve: Mechanical seal rings, corrosion and wear-resistant liners.

  • Metallurgy & Energy: High-temperature kiln furniture roller bars, burner nozzles.

  • Laser & Optics: Lightweight mirror mounts, stabilization platforms.

Manufacturing Process Overview

Raw Material Preparation → Isostatic Pressing → Precision Machining (CNC) → High-Temperature Sintering → Non-Destructive Testing → Grinding/Polishing → Cleaning & Packaging. Each step is strictly quality-controlled to ensure dimensional accuracy and reliable performance.

Usage Instructions

  1. Installation: Use matching bolts through the peripheral mounting holes. Tighten evenly to avoid excessive stress on any single point.

  2. Cleaning: Clean with a neutral detergent and a soft cloth. Avoid impact with hard objects or scratching the surface.

  3. Operation: Please use within the rated temperature and pressure limits. Avoid impact loads that exceed its mechanical strength.

  4. Storage: Store in a dry, clean environment to prevent surface contamination.

After-Sales Service

We provide comprehensive technical support and after-sales service, including: product technical consultation, custom manufacturing, and quality assurance. Please contact our customer service department if you identify any manufacturing defects.

Frequently Asked Questions (FAQ)

Q1: What are the advantages of silicon carbide ceramic over alumina ceramic?
A: Silicon carbide significantly outperforms alumina in hardness, thermal conductivity, high-temperature resistance, and strength. It is the superior choice, especially in applications requiring high thermal conductivity and thermal shock resistance.

Q2: What is the purpose of the concentric rings and lines on the surface?
A: These features are typically used for precise positioning, guiding media flow, increasing surface area, or reducing contact area to minimize friction and adhesion.

Q3: Can you customize the dimensions and hole pattern for my equipment?
A: Yes. We support custom orders based on your drawings or samples. We can adjust the diameter, thickness, hole pattern, and surface design according to your specific requirements.


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