Chemical Vapor Deposition (CVD) System Ultimate Vacuum 5*10-3Pa
Vacuum Coating Machine
Scope of Application with Vacuum Coating Machine:
Film deposition in semiconductor chip industry, solar photovoltaic,
LED and other industries.
Product Features with Vacuum Coating Machine:
The carefully optimized gas distribution and flow field design,
along with the intelligent reaction pressure automatic control
system, ensures the utmost uniformity and stability of the film
deposition, perfectly meeting the stringent requirements of the
active layer and passivation layer for low-defect and high-quality
interfaces in thin films.
Product Parameters with Vacuum Coating Machine:
| Model | LPCVD | MOCVD | PECVD |
| Ultimate Vacuum (No Load, Clean) | 5*10-3Pa |
| Power Supply | None | None | RF |
| Precursor | Gas or Liquid | MO Source | Special Gas |
| Substrate Temperature | 200℃~800℃ | 300℃~1500℃ | Room Temperature ~ 600℃ |
| Exhaust Gas Treatment | Discharge or Recycle After Combustion Meets Standards |
| System Control | SIEMENS PLC System, PROFIBUS Communication |
Product Image with Vacuum Coating Machine:
Our advantage service:
We possess a professional R&D and design team that leverages
their proficient skills and innovative thinking to provide
customers with uniquely crafted product solutions. If you have any
novel ideas or unique needs for a product, please feel free to
share them with us, and we will carefully craft a one-of-a-kind
product design based on your creativity and expectations, meeting
all your aspirations.
Technical support:
All our workers are experienced and skilled.
After sale service:
Our professional working team and outstanding sales team are
committed to providing our clients with products worldwide and
guaranteeing fast and efficient after-sales services to meet
various needs.
About Us:
Guangzhou Hejin Automation Control Technology Co., Ltd. is a modern
enterprise specialized in the research and development,
manufacturing, and sales of technology-intensive industrial
equipment. The company's leading products include vacuum helium
leak detection equipment, automatic brazing machines for gas/liquid
filling and recovery systems, lean production lines, and laboratory
testing equipment. These products are widely used in industries
such as automobiles, refrigeration, power, home appliances,
electronics, pharmaceuticals, plumbing, military, and others. Led
by Mr. Li Jianhe, an expert with profound knowledge in vacuum and
automated testing equipment, the company possesses its own core
technology and holds multiple invention and utility model patents.
Relying on a high-level talent team, the company has adopted a new
production model focused on development and design, assembly and
debugging, as well as after-sales service, and provides products
that are suitable for customers' specific usage and technical
requirements. Since its establishment, the company has introduced
various types of specialized equipment to the market, satisfying
domestic market demand while also exporting to countries and
regions in America, Europe, Asia, and Africa.
