3Inch Optical Grade Quartz Wafer Transmittance >92%
Semiconductor Glass Substrates
ZMSH specializes in custom-manufactured 3-inch quartz wafers,
offering tailored solutions for advanced optoelectronic, MEMS, and
semiconductor applications. Unlike standard 2-inch wafers, 3-inch quartz wafers provide
expanded surface area for multi-component integration, enabling
high-precision devices with enhanced performance. Key features include:
· Material: High-purity fused silica (SiO₂) with <50 ppm
hydroxyl content, ensuring ultra-low optical loss.
· Dimensions: Custom diameters (3.00" ±0.02") and thicknesses
(0.525–1.200 mm, TTV ≤10 μm).
· Shapes: Circular, square, or irregular geometries with
non-standard apertures, stepped edges, or gradient thickness.
· Surface Finish: Ultra-smooth surfaces (Ra ≤1.0 nm) for minimal
light scattering.
Specification for 3inch quartz wafer
| Parameter | Specification |
| Diameter | 3 inch (76.2mm) |
| Thickness Tolerance | ±0.02mm |
| Surface Roughness | ≤1nm (Polished Grade) |
| Transmittance @193nm | >92% |
| CTE (RT-300°C) | 0.55×10⁻⁶/°C |
| Parallelism | ≤5μm |
| Vacuum Compatibility | 10⁻⁹ Torr |
Key Characteristics of 3inch quartz wafer
1. Optical Superiority
- Broad Spectral Transmission: >92% transmittance from 185
nm (UV) to 3500 nm (IR), ideal for UV lithography and quantum
sensing .
- Low Thermal Expansion: CTE of 0.52×10⁻⁶/°C, maintaining
dimensional stability up to 1100°C.
2. Mechanical & Chemical Resilience
- High Hardness: Mohs scale 7, resistant to abrasion and
mechanical shock.
- Acid Resistance: 30× higher durability than ceramics,
suitable for aggressive chemical environments .
3. Electrical Performance
- Insulation: Resistivity >10¹⁸ Ω·cm, minimizing parasitic
capacitance in high-frequency circuits.
- SAW Compatibility: Optimized for Surface Acoustic Wave (SAW)
filters with precise cutting angles (e.g., 34.33° for FC-cut) .
Strategic Applications of 3inch quartz wafer
1. Advanced MEMS Devices
- Pressure sensors, gyroscopes, and inkjet printheads leveraging
3-inch wafers for multi-layer integration and thermal stability.
2. Optoelectronic Systems
- UV laser diodes, fiber-optic collimators, and LiDAR components
requiring low-loss optical paths.
3. Semiconductor Packaging
- Wafer-level packaging (WLP) substrates for CMOS image sensors and
RFICs, supporting TSV (Through-Silicon Via) technology.
4. Quantum Technologies
- Substrates for diamond nitrogen-vacancy (NV) centers and
superconducting qubits, benefiting from ultra-low defect density.
Quartz Capillary Tubes: Brief Overview
ZMSH's quartz capillaries are engineered for microfluidic and
optical applications, featuring:
- Custom Sizes: Inner diameters from 50 μm to 5 mm, lengths up to 300 mm.
- Ultra-High Purity: <1 ppm metallic impurities for biocompatibility in
lab-on-a-chip systems.
- Processing: Laser drilling, thermal forming, and chemical etching for seamless
integration into sensors or optical fibers.
FAQ
