Quartz boats Fused Silica Boat SiO₂≥99.99% Surface Roughness
Ra≤0.1μm Wafer Carrier
Quartz glass boats are specialized vessels manufactured from
high-purity silicon dioxide (SiO₂) through high-temperature melting
processes. Renowned for their exceptional thermal resistance,
chemical stability, and optical transparency, they serve as
irreplaceable components in semiconductor fabrication, laboratory
R&D, medical devices, and high-temperature industrial
applications. Engineered to balance precision structures with
material performance limits, these boats operate stably in extreme
temperatures (-270℃ to 1450℃) while resisting strong acids,
alkalis, and electromagnetic interference. They are widely used for
high-temperature process carriers, optical component supports, and
precision experiment platforms. With the rise of third-generation
semiconductors and new energy industries, demand for quartz glass
boats in chip manufacturing, laser packaging, and high-temperature
reaction systems continues to grow, solidifying their role as
critical infrastructure in advanced labs and production lines.
Specification for quartz boats
| Chemical Composition: | SiO₂ 99.9%; 99.98% |
| Density: | 2.2 (g/cm³) |
| Mohs Hardness: | 6.6 |
| Melting Point: | 1732 ℃ |
| Operating Temperature: | 1100 ℃ |
| Max Short-Term Temperature: | 1450 ℃ |
| Acid Resistance: | 30× ceramics / 150× stainless steel |
| Visible Light Transmittance: | >93% |
| UV Transmittance: | 80% |
| Electrical Resistivity: | 10,000× conventional glass |
| Annealing Point: | 1215 ℃ |
| Softening Point: | 1730 ℃ |
Material types of quartz boats
| Type | Characteristics | Applications |
| Transparent Quartz Boat | JGS1 grade (UV-grade), OH content <5ppm, >90% transmittance
@185nm | Lithography, epitaxy (optical-sensitive processes) |
| Opaque Quartz Boat | Milky appearance, porosity <0.3%, 50% improved thermal shock
resistance | Diffusion, annealing (high-temperature processes) |
| Synthetic Quartz Boat | CVD-processed, metal impurities <0.1ppm, superior plasma
corrosion resistance | Etching, ion implantation (dry processes) |
| Doped Quartz Boat | Ti/Ce-doped, crystallization resistance up to 1300℃ | Single-crystal silicon growth, MOCVD (ultra-high-temp environments) |
Primary applications of quartz boats
| Industry | Typical Use Cases | Key Requirements |
| Semiconductor | Wafer diffusion, LPCVD process carriers | High-temp deformation <0.1mm/300mm |
| Photovoltaics | PERC cell P-diffusion, TOPCon tunnel oxide layer | POCl₃ corrosion resistance ≥200 cycles |
| LED Epitaxy | MOCVD reaction chamber wafer holders | Surface roughness ≤0.05μm |
| Precision Annealing | Magnetic materials, specialty alloy heat treatment | Metal vapor erosion resistance |
| Research Equipment | Synchrotron beamline sample holders, MBE substrates | Ultra-high vacuum compatibility (<10⁻⁸Pa) |
Key advantages of quartz boats
1. Extreme Thermal Performance
· Long-term operating temperature: 1100℃ (short-term up to 1450℃)
· 1000 thermal cycles (-196℃↔1200℃) without cracking
2. Chemical Stability
· Resists all strong acids except HF (98% H₂SO₄, 37% HCl, etc.)
· 3× better alkali resistance than conventional ceramics
3. Physical Properties
· Thermal conductivity: 1.4 W/(m·K) (prevents heat accumulation)
· Dielectric strength: 40 kV/cm (at 20℃)
4. Cleanliness Control
· Produced in Class 10 cleanrooms
· Surface particles ≤5 counts/cm² (≥0.3μm)
ZMSH's Services
ZMSH specializes in customized quartz glass boats for
semiconductors, photovoltaics, and optoelectronics. Equipped with quartz research institute and CNAS-certified lab, we
utilize laser 3D inspection systems to achieve ±0.01mm machining
accuracy and atomic-level surface treatment. Our engineering team offers end-to-end support from structural
design, thermal simulation to process validation, with expertise in
ultra-high-temperature (1600℃) and extreme thermal shock (ΔT≥1200℃)
applications. Through our Class 10 cleanroom and smart production line, we
accommodate R&D prototypes.
Related product recommendations: Quartz capillary
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