Suitable for mass production of vapor deposition materials such as
silicon oxide; High precision temperature difference control, high
temperature and high vacuum; With high vacuum sublimation,
reaction, degreasing, dehydration, vapor deposition material
automatic grinding scraping, furnace collection and other special
process capabilities.
Equipment features:
A large amount of material, high production efficiency.
l The whole process is completely closed and automatic operation,
avoid dust flying, the production site environment is clean and
clean.
l Temperature control within 1500 degrees, fast heating rate.
l can maintain stable operation under vacuum.
Equipment parameters:
l Furnace type is horizontal structure.
l Equipment is composed of sublimation system, collection system,
heating system, temperature control system, vacuum system,
mechanical system and cooling system.
The sublimation system is composed of a heating zone and a
collection zone. The heating zone is composed of induction coil,
heavy corundum, graphite hard felt and isostatic graphite. The
collection area is composed of 310S stainless steel and insulation
layer.
l Temperature control system adopts PLC touch screen centralized
control mode, automatic control, with network port, can realize
remote control.
l The heating system adopts induction heating, and the power supply
adopts IGBT energy saving power with low noise and about 15% energy
saving compared with the traditional thyristor power supply.
The vacuum system consists of multistage vacuum pump, vacuum valve,
pressure controller and pipeline.
l The furnace body is made of double-layer water cooling structure
inside and outside, and the part in contact with the cooling water
is made of 304 stainless steel, which effectively prevents the
furnace body from leaking gas for a long time.
l The cooling system is equipped with a closed cooling system. The
internal circulation uses deionized water, which will not cause
scaling in the equipment pipeline. The internal circulation water
loss is small. Good heat dissipation effect, integrated
environmental protection, small footprint and so on.
l The size of the constant temperature zone: Φ500mm*600mm,
Φ600mm*800mm, Φ700mm*1000mm, Φ800mm*1600mm and so on. (can be
customized according to customer needs)
