6 inch semiconductor fast annealing furnace

... annealing furnace is a high-precision heat treatment equipment designed for semiconductor materials, which uses a double chamber structure to achieve an efficient and uniform rapid heating and cooling process. In the semiconductor materials industry, the...

..., supports various oxidation, annealing, and LPCVD processes. The system features a 21-cassette automatic transfer with seamless MES integration, ideal for semiconductor manufacturing. Working Principle The furnace features a vertical tube structure and...