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...ElectronDetector and In-Lens Electron Detector Image Resolution ≤1nm@15kV; ≤1.5nm@1kV Beam Current Densit >5300 A/cm2 Minimum Beam Spot Size ≤2 nm Lithography Specitications Electron Beam Shutter Rise Time <...
... lithography is a key technology for low-cost and large-scale production of nanostructures.Silicon or quartz templates produced by either electron beams or DUV lithography and reaction ion etching are curren...
...years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel, LaB6 upgrade,integrated with STM,AFM,Heating St...
... thin film pressure sensor adopts the advanced ion-sputtering thin film and ion beam lithography technology. Now this sensor is widely used in the pressuring measuring of the new model and huge thrust low te...