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... chamber, vacuum pumps, arc sources, spindle & jack, jigs structure, heating & cooling, water & gas (distribution), electrical control & operation systems, substrate carrier etc. 2. Benefits: easy to operate...
..., arc sources, spindle & jack, jigs structure, heating & cooling, water & gas (distribution), electrical control & operation systems, substrate carrier etc. 2. Benefits: easy to operate, compact foot print, ...
... chamber, vacuum pumps, arc sources, spindle & jack, jigs structure, heating & cooling, water & gas (distribution), electrical control & operation systems, substrate carrier etc. 2. Benefits: easy to operate...