99.95% purity Ta Sputtering target sheet for semiconductor coatings
and optical coatings
1.
Uses: mainly used in semiconductor coatings and optical coatings.
Purity: 99.95% -99.99%.
Specification: square target, thickness x width x length = 5 ～
25x≤800x≤2000 (mm)
Grain size: Recrystallization degree ≥98%, average grain size
<100μm, uniform grain distribution, no delamination. According
to the special requirements of users, the grain size> 100μm or
<50μm can be met.
Flatness ≤0.2mm.
Surface roughness <1.6μm.
Other properties:
Metal element content table (GDMS) unit (ppm)
| element | content | element | content | element | content |
| Al | ≤0.2 | Ga | ≤1.0 | Pb | ≤1.0 |
| Ag | ≤1.0 | Ge | ≤1.0 | S | ≤0.2 |
| Au | ≤1.0 | Hf | ≤1.0 | Si | ≤0.2 |
| B | ≤0.1 | K | ≤0.05 | Sn | ≤0.1 |
| Bi | ≤1.0 | Li | ≤0.1 | Th | ≤0.005 |
| Ca | ≤0.1 | Mg | ≤0.1 | Ti | ≤1.0 |
| Cd | ≤1.0 | Mn | ≤0.1 | V | ≤0.2 |
| Cl | ≤1.0 | Mo | ≤5.0 | W | ≤70 |
| Co | ≤0.05 | Na | ≤0.1 | Zn | ≤1.0 |
| Cr | ≤0.25 | Nb | ≤75 | Zr | ≤0.2 |
| Cu | ≤0.75 | Ni | ≤0.25 | Y | ≤1.0 |
| Fe | ≤0.4 | P | ≤1.0 | U | 0.005 |
| | | | Ta | Bal |
Gas element content table (LECO) unit (ppm)
| element | content | element | content | element | content |
| C | ≤40 | N | ≤25 | H | ≤2 |
| O | ≤100 | | | |
|
2.Image
3.Factory & Certificate
4.Package & Delivery
package:
Wrap the target material with pearl cotton and put it in a wooden
box. Our reasonable packaging method can avoid the target materials
from colliding with each other during transportation, and can also
prevent the impact of external goods on the product, and ensure
that the product is delivered after delivery Integrity.
---1. The sealed packaging,then put in the Carton cas or standard
standard plywood case.
---2.Using exclusive custom carton with customer logo, each individual
packaging, to help buyers direct sales.
---Accept customer requirment
Make sure that each package is tailor-made for you.ensure when you get the goods no damaged.
