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SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment

    Buy cheap SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment from wholesalers
     
    Buy cheap SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment from wholesalers
    • Buy cheap SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment from wholesalers
    • Buy cheap SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment from wholesalers
    • Buy cheap SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment from wholesalers

    SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment

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    Brand Name : ROYAL
    Model Number : RTSP1213-DC
    Certification : CE certification
    Price : negotiable
    Payment Terms : L/C, D/A, D/P, T/T
    Supply Ability : 6 sets per month
    Delivery Time : 16 weeks
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    SiC Fuel Cell Module Thin Film Deposition Equipment , PECVD Magnetron Sputtering Equipment


    SiC Fuel Cell Module PECVD Sputtering System / Hydrogen Fuel Cell Magnetron Sputtering Coating Equipment


    SiC Fuel Cell Module Sputtering System Specifications


    MODELRTSP1213-DC
    MATERIALStainless Steel (S304)
    CHAMBER SIZEΦ1250 * 1350mm (H)
    CHAMBER TYPEFront and back 2 - doors structure, Vertical
    SINGLE PUMP PACKAGERotary Piston Vacuum Pump
    Roots Vacuum Pump
    Magnetic Suspension Molecular Pump
    Rotary Vane Pump (Holding Pump)
    TECHNOLOGYMagnetron Sputtering, Ion Source PECVD
    POWER SUPPLYSputtering power supply + Bias Power supply + Ion Source
    DEPOSITION SOURCE2 pairs DC/RF Sputtering Cathodes + (2 pairs spare using) + Ion Source
    CONTROLPLC+Touch Screen
    GASGas Mass Flow Meters ( Ar, N2, C2H2, O2) Argon, Nitrogen and Ethyne,Oxygen
    SAFETY SYSTEMNumerous safety interlocks to protect operators and equipment
    COOLINGCooling Water
    CLEANINGGlow Discharge/Ion Source
    POWER MAX.150KW
    AVERAGE POWER CONSUMPTION75KW

    The SiC Fuel Cell Module Sputtering System is exclusively designed and developed for FCV vechiles application. FCV is the short name of Fuel Cell Vehicle, it is the newest technology for next generation of green cars. It can generate electrical energy continuously by electrochemical reaction between oxygen and hydrogen. It is different from the primary battery such as dry cell and rechargeable battery that needs to repeat charging.

    The core technology is how to generate the electrical energy with fuel cell power module through electrochemical reaction between hydrogen as fuel and oxygen.

    Hydrogen fuel cell as the most key important part of the power module, scientists, engineers, professors from transportation organizations and worldwide vehicles manufactures have made thousands tests and finally found the proper processing.

    Hydrogen Fuel Cell Power Module Sputtering System with the PECVD (Plasma Enhanced Chemical Vapor Deposition) Technology to deposit high uniformity, strong adhesion SiC thin films.

    The Hydrogen fuel cell sputtering machine contains ion source, balanced/unblanced sputtering cathodes; with stable and large volume vacuum pumping system.

    The special designed rack and jig system can take out-move in completely for a substrates convenient loading/unloading.



    Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

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