Double-Side Polished High-Purity SiC Mirror Optical Component for
MEMS Micromirror
A Small-Size Double-Side Polished Silicon Carbide (SiC) Mirror is a
high-performance optical component manufactured from
ultra-high-purity silicon carbide (SiC) ceramic through
precision machining and double-side polishing (DSP) technology.
Its core features include compact dimensions (typically ≤50mm in
diameter or side length) and nanoscale surface finish on both
sides, specifically designed for modern high-end optoelectronic
systems with extreme requirements for size, weight, stability,
and optical precision. Leveraging the inherent properties of
silicon carbide—ultra-high hardness, high stiffness, low thermal
expansion, high thermal conductivity, and exceptional chemical
stability—it is produced via processes such as reaction
sintering, chemical vapor deposition (CVD), or pressureless
sintering. The implementation of double-side ultra-precision
polishing (surface roughness Ra typically ≤0.5 nm) enables it to
serve as a core component in many compact precision optical
devices.
SiC Mirror Characteristic
1. Ultra-Lightweight & Miniaturization:
- The compact design (e.g., 20–50mm diameter) combined with SiC’s
low density (~3.1 g/cm³) achieves extremely light weight
and a compact structure, making it ideal for space- and
weight-sensitive integrated equipment.
2. Superior Stability & Environmental Resistance:
- The low coefficient of thermal expansion (~4.5×10⁻⁶/℃) and
high elastic modulus (>400 GPa) ensure exceptional
dimensional and surface stability under temperature fluctuations
and mechanical vibrations, with strong resistance to deformation.
3. Excellent Thermal Management:
- High thermal conductivity (~120–200 W/m·K) facilitates rapid
and uniform heat dissipation, preventing local hot spots and
ensuring stable performance and reliability of optical systems
under high-temperature or high-power conditions.
4. Top-Tier Optical Surface Quality:
- Through double-side polishing technology, it achieves
nanoscale surface smoothness (Ra ≤ 0.5 nm) on both sides and
ultra-high flatness/parallelism, minimizing light scattering
and loss while ensuring high imaging quality.
5. Outstanding Durability & Chemical Inertness:
- High hardness (Mohs 9.5) provides wear and scratch resistance,
and resistance to acids, alkalis, and plasma erosion ensures
long-term performance in harsh environments, extending service
life.
SiC Mirror Application Scenario
Small-size double-side polished SiC mirrors are critically used in
the following high-end fields due to their unique advantages:
AR/MR Glasses Optical Systems:
As diffractive waveguide lenses, prisms, or reflectors for
guiding and displaying light paths. Their high refractive index
(~2.65), lightweight, and small size are key to achieving slim
glasses design, large field of view (FOV), and elimination of
rainbow patterns.
- Semiconductor Lithography & Precision Inspection Equipment:
As reflectors or lens substrates in the illumination systems of
lithography machines or sensors of wafer inspection
equipment. Their high thermal stability and flatness are
crucial for maintaining nanoscale overlay accuracy and inspection
precision.
- High-End Laser Optical Systems:
Used in laser galvanometers, laser interferometers, or as
reflectors/window mirrors in high-power lasers. Their high
damage threshold, high thermal conductivity, and stability ensure
precise laser beam steering and long-term stable system
operation.
- MEMS & Micro-Optics Fields:
As substrate materials for MEMS micromirrors or substrates
for micro-optical devices, applied in LiDAR, projectors, etc.,
meeting stringent requirements for high-frequency response, high
stability, and miniaturization.
SiC Mirror Key Material & Performance Parameters
| Parameter Category | Parameter Name | Typical Value/Range |
| Material Characteristics | Primary Material | Ultra-high-purity SiC |
| Density | ~3.0 – 3.2 g/cm³ |
| Elastic Modulus | >400 GPa |
| Coefficient of Thermal Expansion | ~4.5×10⁻⁶/℃ |
| Thermal Conductivity | ~120 – 200 W/(m·K) |
| Mohs Hardness | 9.5 |
| Optical & Surface Properties | Surface Roughness (Ra, DSP) | ≤ 0.5 nm |
| Surface Figure Accuracy (PV/RMS) | Up to λ/10 @ 632.8nm or better |
| Dimensional Characteristics | Common Size Range | Diameter or side length 20–50mm |
| Functional Characteristics | Operating Temperature | -50℃ to 500℃ (or higher, process-dependent) |
ZMSH's SiC Ceramic Products
2. SiC Ceramic Vacuum Chuck Flip-Chip Bonding Mirror Polishing
High-Stiffness
1. Q: How do SiC mirrors work in optics?
A: SiC mirrors function by leveraging silicon carbide's extremely
low thermal expansion coefficient (~4.5×10⁻⁶/℃), high thermal
conductivity (~120–200 W/m·K), and high stiffness (>400 GPa)
to maintain nanoscale surface stability under extreme
temperatures and mechanical stress, ensuring minimal distortion in
high-precision optical systems like space telescopes or EUV
lithography equipment.
2. Q: How does a silicon carbide (SiC) mirror perform in extreme
environments?
A: Silicon carbide (SiC) mirrors excel in extreme environments
due to their extremely low coefficient of thermal expansion and
exceptional thermal stability. For instance, in space
applications, they operate reliably across a temperature range from
-60°C to 180°C. In automotive LiDAR systems, where engine
compartment temperatures can exceed 125°C, SiC mirrors maintain
minimal surface deformation. Additionally, their high hardness
(Mohs hardness of 9.5) and superior chemical inertness enable
effective resistance to vibration, impact, and corrosion from acids
or alkalis, ensuring long-term stability under harsh conditions.
Tags: #SiC Mirror, #Customized, #Double-Side Polished,
#High-Purity, #Optical Component, #Corrosion-Resistant,
#High-Temperature Rated, #MEMS Micromirror
