High Purity Titanium Sputtering Targets for PVD Vacuum Coating
Machine
High purity titanium sputtering targets
| Product name | Titanium Sputtering Targets for pvd coating machine |
| Grade | Titanium (Gr1, Gr2, Gr5, Gr7,GR12) Alloy target: Ti-Al, Ti-Cr, Ti-Zr etc Other materials:chrome,zirconium,copper ,tungsten etc. |
| Origin | Baoji city, Shaanxi Province,hina |
| Titanium content | ≥99.5 (%) |
| Impurity content | <0.04(%) |
| Density | 4.51 or 4.50 g/cm3 |
| Standard | ASTM B348 , ASTM B381 |
Size | 1. Round target: Ø30--2000mm, thickness 3.0mm--300mm; 2. Plate Targe: Length: 200-500mm Width:100-230mm Thickness:3--40mm 3. Tube target: Dia:30-200mm Thickness:5-20mm Length:500-2000mm 4. Customized is available |
| Technique | Forged and CNC Machined |
| Application | Semiconductor separation, Film coating materials, Storage Electrode
coating, Sputtering coating, Surface coating, Glass coating
industry. |
Basic requirements for titanium sputtering targets:
In general, the following indicators will be considered when
measuring whether the sputtering target meets the main
requirements:
Purity: Purity has a great influence on the performance of the
sputtered film. Take titanium target as an example, the higher the
purity, the better the corrosion resistance, electrical and optical
properties of the sputtered film.
Impurity content: impurities in the target solid and oxygen and
water vapor in the pores are the main pollution sources of the
deposition film. Different target materials have different
requirements for their impurity content.
Density: The density of the target will not only affect the
sputtering rate, but also affect the electrical and optical
properties of the film. Therefore, in order to reduce the porosity
in the target solid and improve the performance of the sputtered
film, the target is usually required to have a high density.
Grain size and grain distribution: for the same target, the
sputtering rate of fine grain target is faster than that of coarse
grain target; The smaller the particle size difference (uniform
distribution), the more uniform the thickness of the target
sputtering deposition film.
Detailed images:
Packaging: Each titanium target is packed in a customized vacuum plastic bag,
filled with foam film and pearl cotton in the middle, and a
fumigation-free plywood case outside. Comply with international
transportation standards, to ensure that the goods are safe in
transportation.
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