Semiconductor Photoresist Ultrasonic Lithography Coating System

Semiconductor Photoresist Ultrasonic Lithography Coating System

Description:

Ultrasonic spraying is a simple, economical, and reproducible process for photoresist coating in photolithography wafer processing. FUNSONIC's semiconductor photoresist ultrasonic lithography coating system uses advanced layering technology to finely control flow rate, coating speed, and deposition amount. Low speed spray molding defines atomized spray as an accurate and controllable pattern to avoid overspray and produce very thin and uniform layers.
FUNSONIC's semiconductor photoresist ultrasonic lithography coating system has advantages in depositing more uniform coatings, especially along the top of the sidewalls of high aspect ratio grooves and V-shaped groove structures. Centrifugal rotation cannot deposit uniform coatings along the sidewalls, without accumulating too much photoresist at the bottom of the cavity.

Parameters:

Advantages:

1. Uniform film coverage of various surface contours.
2. Able to coat high aspect ratio grooves with excellent uniformity.
3. Non clogging atomizing spray.
4. Capable of depositing highly uniform single micron thin layers.
5. Repeatable mature spraying process.

Semiconductor Photoresist Ultrasonic Lithography Coating System

Hangzhou Qianrong Automation Equipment Co.,Ltd.

Is the professional manufacturer of ultrasonic research, high power ultrasonic transducer development and production in China.

Our main products are Ultrasonic Welding transducer, ultrasonic power supply, ultrasonic metal welder, ultrasonic wire antenna parts and so on. These productions are widely used in various fields, such as plastic welding, metal welding, non-woven sealing and cutting and so on.

Since Qianrong Equipment establishment, the company has always focused on customer needs. While exploring the domestic market in China, we also demonstrates our company’s ultrasonic technology to the world. Its quality and performance are well-known in the industry.

Adhering to the “focus on ultrasonic application, in good faith to win customers, to win the reputation of quality” development purpose, becoming the world’s leading supplier of ultrasonic core components, through our professional level and unremitting efforts, quality products for customers in the development of the industry to create greater value return.