Sic raw material synthesis furnace 50kg resistance preparation of
high purity Sic crystal
Silicon carbide raw material synthesis furnace is a kind of
equipment specially used for preparing high purity silicon carbide
(SiC) raw material. As an important semiconductor and ceramic
material, silicon carbide is widely used in power electronics, high
temperature devices, wear-resistant materials and optical devices.
Synthesis furnace converts silicon (Si) and carbon (C) raw
materials into silicon carbide through high-temperature chemical
reaction, and is a key equipment in the silicon carbide industry
chain.
Characteristics of SiC raw material synthesis furnace
- High temperature capacity: It can provide a high temperature
environment above 1600°C to meet the needs of silicon carbide
synthesis.
- High purity synthesis: Through high purity raw materials and
inert atmosphere control, high purity silicon carbide is
synthesized.
- High stability: The equipment structure is stable, suitable for
long-term continuous work.
- Low pollution: high purity materials and inert atmosphere are
used to reduce the impact of impurities on synthetic raw materials.
Technical specifications
| Specification | Details |
|---|
| Dimensions (L × W × H) | 4000 x 3400 x 4300 mm or customize |
| Furnace chamber diameter | 1100mm |
| Loading capacity | 50kg |
| The limit vacuum degree | 10-2Pa(2h after the molecular pump starts) |
| Chamber pressure rise rate | ≤10Pa/h(after calcination) |
| Lower furnace cover lifting stroke | 1500mm |
| Heating method | Induction heating |
| The maximum temperature in the furnace | 2400°C |
| Heating power supply | 2X40kW |
| Temperature measurement | Two-color infrared temperature measurement |
| Temperature range | 900~3000℃ |
| Temperature control accuracy | ±1°C |
| Control pressure range | 1~700mbar |
| Pressure Control Accuracy | 1~5mbar ±0.1mbar;
5~100mbar ±0.2mbar;
100~700mbar ±0.5mbar |
| Loading method | Lower loading; |
| Optional configuration | Double temperature measuring point, unloading forklift. |
Design advantage
1. A large amount of loading, can achieve 1 equipment to multiple
long crystal furnace, improve production efficiency;
2. Using 1 to 2 power supply with the same frequency, can
effectively control the axial temperature gradient;
3. The top and bottom can be equipped with infrared temperature
measurement, which is convenient for temperature field monitoring
and process debugging;
4. High vacuum, high pressure control accuracy, high temperature
control accuracy, to meet the synthesis of high purity silicon
carbide raw materials:
5. Adopt the loading and unloading mode, which is safe and
reliable, and can be configured with unloading forklift;
6. Using high-precision butterfly valve and mass flowmeter to
control the pressure in the furnace, providing a stable process
atmosphere;
7. The equipment can be arranged side by side, saving space and
improving plant utilization.
The effect of SiC raw material synthesis furnace
The use of silicon carbide raw material synthesis furnace can
efficiently prepare high-purity silicon carbide raw materials, the
purity of up to 99.999% or more, to meet the stringent requirements
of the semiconductor industry for materials. The synthetic silicon
carbide raw material is used to grow high-quality single crystals
and manufacture power devices (such as MOSFETs and diodes) with
high voltage, low loss and high frequency characteristics,
significantly improving the performance of electric vehicles, solar
inverters and other applications. In addition, the synthesized
silicon carbide powder can also be used in high-performance
ceramics and optical devices, further expanding its application
range.
ZMSH service
ZMSH provides full process services from the design and manufacture
of the silicon carbide feedstock synthesis furnace to after-sales
support, including equipment customization, process optimization
and technical training. With advanced technology and rich industry
experience, we ensure high efficiency, stability and low energy
consumption of equipment, while providing fast response and
all-weather technical support to help customers achieve large-scale
production of high-quality silicon carbide raw materials.
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